Materials Science in Semiconductor Processing · 2013 · 44 citations · 22 references
Natural SciencesChemistryMaterials ScienceMaterials ChemistryOptical MaterialsThin FilmsOptical Thin FilmsSemiconductor Thin FilmsSurface PhysicsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsDoping In Thin FilmsOptical PropertiesSurface Optical PropertiesThin-film Optical Characterization
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