Fabrication of high-purity chalcogenide glasses by chemical vapor deposition

Abstract

High-purity Ge–Se chalcogenide glasses were fabricated using chemical vapor deposition. Gas-phase GeCl4 and SeCl2 were used together with H2 for the reaction. High transparency was observed over a wide IR region of 2–10 μm. In addition, it is reported that heat treatment under NH3 and CO gas flow has been found to be effective for eliminating oxygen impurities. Using this technique, the oxygen content was reduced to below 1 wt. ppm. These glass compounds are applicable for infrared-transmitting windows as well as infrared optical fibers.