Publication | Closed Access
XPS and ARXPS investigations of ultra thin TaN films deposited on SiO2 and Si
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Citations
9
References
2005
Year
Materials ScienceEngineeringOxide ElectronicsSurface ScienceArxps InvestigationsApplied PhysicsThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film Processing
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