Applied Physics Letters · 1974 · 11 citations · 10 references
EngineeringElectrical EngineeringMaterials EngineeringAcousticsMicroelectromechanical SystemsMicrowave EngineeringPhysical AcousticsTransducer TechnologyAcoustic Transducer DesignResonanceResonant FrequencyResonator DesignSurface Acoustic Waves
A surface acoustic wave planar resonator is described in theory and experiment. The resonance is due to energy storage within an interdigital transducer. Experimental results are reported for a one hundred finger pair double electrode transducer on YZ LiNbO3 which exhibited a resonance Q of 1900 at 34 MHz. The resonator is unique in that the resonant frequency is not determined by material dimensions and many such devices can be fabricated upon a common substrate.
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