Publication | Closed Access
Influence of acid slurries on surface quality of LBO crystal in fixed abrasive CMP
16
Citations
22
References
2014
Year
Materials ScienceChemical EngineeringEngineeringSurface ScienceSurface EngineeringLbo CrystalAbrasive ProcessSurface TreatmentAcid SlurriesSurface ProcessingFixed Abrasive CmpMicrostructure
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