Publication | Closed Access
Fabrication of autocloned photonic crystals using electron-beam guns with ion-assisted deposition
10
Citations
7
References
2007
Year
Materials SciencePhotonicsEngineeringElectron-beam LithographyIon-assisted DepositionApplied PhysicsElectron-beam GunsAutocloned Photonic CrystalsIon BeamPhotonic DeviceOptoelectronicsPhotonic CrystalsBeam Optic
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