Steric Effects in Dissociative Adsorption of Low-Energy CH₃Cl on Si(100): Orientation and Steering Effects

Abstract

We report the rotational-state dependence of the sticking probability and a study of the steric effect for the 65 meV CH3Cl incidence on Si(100). We found that the steric effects are quite small and independent of the rotational state of |J,K,M〉 = |111〉 or |212〉 at such a low incident energy as the thermal backfilling condition. The steering effects smear the orientation effects upon the system being trapped into a precursor state.