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Effect of Sputtered ZnO Layers on Behavior of Thin-Film Transistors Deposited at Room Temperature in a Nonreactive Atmosphere

Room TemperatureElectrical EngineeringEngineeringOxide ElectronicsApplied PhysicsNonreactive AtmosphereSemiconductor MaterialSputtered Zno LayersThin FilmsThin Film ProcessingSemiconductor Device