Effect of nitrogen flow ratio on structure and properties of zirconium nitride films on Si(100) prepared by ion beam sputtering - Concepedia

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Effect of nitrogen flow ratio on structure and properties of zirconium nitride films on Si(100) prepared by ion beam sputtering

13

Citations

10

References

2012

Year

shahab norouzian, Majid Mojtahedzadeh Larijani, Reza Afzalzadeh

Bulletin of Materials Science

Materials ScienceMaterials EngineeringNitrogen Flow RatioEngineeringApplied PhysicsZirconium Nitride FilmsIon Beam SputteringVacuum DeviceThin FilmsPulsed Laser DepositionMicroelectronicsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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