ITO DBR Electrodes Fabricated on PET Substrate for Organic Electronics

Abstract

A conductive distributed Bragg reflector (DBR) fabricated on PET substrate using the single indium tin oxide (ITO) material is proposed. The large index contrast of the DBRs was obtained by depositing alternating layers of dense and porous ITO films. The high refractive index of the dense ITO films was achieved by long-throw radio-frequency magnetron sputtering technique at room temperature. On the other hand, the porous ITO films with low refractive index were fabricated by supercritical CO2 (SCCO2) treatment at 60 °C. The index contrast of the dense and porous ITO films as larger as 0.59 at blue spectral range was obtained. For the 4.5-period ITO DBR fabricated on PET substrate, the reflectance and sheet resistance of 85.1% and 47 Ω/◻ were achieved at 475 nm.