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Valency control of P-type a-SiC:H having the optical band gap more than 2.5 eV by electron-cyclotron resonance CVD (ECR CVD)
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Citations
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References
1987
Year
Electron-cyclotron Resonance CvdValency ControlEngineeringPhysicsApplied PhysicsSemiconductor MaterialOptoelectronicsEcr CvdCompound SemiconductorCarbide
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