Quartz microtubes based on macroporous silicon

Abstract

The conditions under which quartz microtubes 5–10 µm in diameter are formed in the course of structuring oxidized macroporous silicon are reported. It is shown that microtubes with a closed bottom can be fixed in a vertical position at equal distances from one another in correspondence with the “lattice” of macroporous silicon and may be of interest as test tubes for a single-chip microlaboratory. In a disordered state, long, thin quartz microtubes form a “glass wool.” It is found that the microtubes and the glass wool exhibit high-intensity photo-and cathodoluminescence with the highest intensity in the green spectral range.