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Influence of deposition pressure on the structural mechanical and decorative properties of TiN thin films deposited by cathodic arc evaporation

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsMechanical EngineeringTin Thin FilmsCathodic Arc EvaporationChemical Vapor DepositionThin FilmsChemical DepositionDeposition PressureThin Film ProcessingMicrostructure