Publication | Open Access
Fully integrated hybrid silicon two dimensional beam scanner
332
Citations
13
References
2015
Year
PhotonicsElectrical EngineeringEngineeringDevice IntegrationIntegrated PhotonicsPhotonic Crystal LensSemiconductor Device FabricationIntegrated CircuitsHybrid Silicon PlatformInstrumentationPhotonic Integrated CircuitMicroelectronicsPhotonic DeviceOptoelectronicsSilicon On InsulatorSilicon PhotonicsHybrid Silicon Two
In this work we present the first fully-integrated free-space beam-steering chip using the hybrid silicon platform. The photonic integrated circuit (PIC) consists of 164 optical components including lasers, amplifiers, photodiodes, phase tuners, grating couplers, splitters, and a photonic crystal lens. The PIC exhibited steering over 23° x 3.6° with beam widths of 1° x 0.6°.
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