Nuclear Instruments and Methods in Physics Research · 1983 · 24 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsAmorphous Electronic MaterialsAmorphous MaterialsAmorphous SemiconductorsSilicon MaterialsAmorphous SiliconHydrogenated Amorphous SiliconSilicon Characterization
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Profiling hydrogen in materials using ion beams
J. F. Ziegler, Chih-Wei Wu, Peter Williams et al. · Nuclear Instruments and Methods · 1978 · 203 citations · Full text