Controlling hydrogen contents and bond configurations for high-quality and high-reliability a-Si films - Concepedia

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Controlling hydrogen contents and bond configurations for high-quality and high-reliability a-Si films

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1989

Year

M. Nishikuni, Hisao Haku, Masao Isomura, Satoshi Okamoto, Katsunobu Sayama, T. Takahama, T. Matsuoka, S. Tsuda, S. Nakano, M. Ohnishi,

Journal of Non-Crystalline Solids

Materials ScienceBond ConfigurationsEngineeringApplied PhysicsHydrogen ContentsSemiconductor MaterialSemiconductor Device FabricationHigh-reliability A-si FilmsHydrogenThin FilmsSilicon On InsulatorThin Film Processing

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