Publication | Closed Access

A study of the effect of composition on the microstructural evolution of a–Si_<i>x</i>C₁−_<i>x</i>: H PECVD films: IR absorption and XPS characterizations

Materials ScienceMaterials EngineeringEngineeringXps CharacterizationsSurface ScienceApplied PhysicsIr AbsorptionH Pecvd FilmsSemiconductor MaterialOptoelectronic DevicesThin Film Process TechnologyThin FilmsEpitaxial GrowthChemical Vapor DepositionThin Film Processing