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The effect of polymer hardness, pore size, and porosity on the performance of thermoplastic polyurethane-based chemical mechanical polishing pads

Materials ScienceChemical EngineeringEngineeringMaterial ProcessingMechanical EngineeringPolymer ScienceSurface TreatmentMechanical PerformanceThermoplastic CompositeSurface ProcessingPolymer Hardness