Identification of the Silicon Vacancy Containing a Single Hydrogen Atom by EPR

Abstract

The electron paramagnetic resonance spectrum of float-zone silicon recorded after implantation with protons contains a strongly temperature dependent signal from a vacancy-type defect. The signal displays monoclinic-I symmetry below 65 K and trigonal symmetry above 100 K. This symmetry change, together with a hyperfine splitting from a single proton, allows an unequivocal identification with ${\mathrm{VH}}^{0}$, the neutral charge state of a vacancy containing a single hydrogen atom. The striking similarity between the properties of ${\mathrm{VH}}^{0}$ and ${\mathrm{VP}}^{0}$ (the $E$ center) corroborate our identification.