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Compositional dependence of Young’s moduli for amorphous Cu–Zr films measured using combinatorial deposition on microscale cantilever arrays

Materials ScienceMaterial AnalysisCompositional DependenceMicroscale Cantilever ArraysEngineeringCombinatorial DepositionSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsAmorphous SolidThin Film ProcessingAmorphous Metal