A morphological and structural study of SiC layers obtained by LPCVD using tetramethylsilane - Concepedia

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A morphological and structural study of SiC layers obtained by LPCVD using tetramethylsilane

40

Citations

9

References

1991

Year

António Figueras, S. Garelik, R. Rodrı́guez-Clemente, B. Armas, C. Combescure, C. Dupuy

Journal of Crystal Growth

Materials EngineeringMaterials ScienceEngineeringApplied PhysicsSic LayersStructural CeramicStructural StudyChemical Vapor DepositionCarbideCeramic Matrix Composite

References

	Year	Citations

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