0.3 V drive voltage GaAs∕AlGaAs substrate removed Mach–Zehnder intensity modulators

Abstract

Push-pull driven Mach–Zehnder intensity modulators with a record low drive voltage of 0.3V were realized in substrate removed very compact GaAs∕AlGaAs optical waveguides at 1.55μm. The modulator electrode is 7mm long, corresponding to a drive voltage length product of 0.21Vcm. The modulation is due to linear electro-optic and carrier depletion effects and has a high speed potential. The propagation loss was 8dB∕cm, making moderately long devices possible.