Time-resolved study of SrTiO3 homoepitaxial pulsed-laser deposition using surface x-ray diffraction

Abstract

Homoepitaxy of SrTiO3 by pulsed-laser deposition has been studied using in situ time-resolved surface x-ray diffraction in the temperature range of 310 °C to 780 °C. Using a two-detector configuration, surface x-ray diffraction intensities were monitored simultaneously at the (0 0 12) specular and the (0 1 12) off-specular truncation rod positions. Abrupt intensity changes in both the specular and off-specular rods after laser pulses indicated prompt crystallization into SrTiO3 layers followed by slower intra- and interlayer surface rearrangements on time scales of seconds. Specular rod intensity oscillations indicated layer-by-layer growth, while off-specular rod intensity measurements suggested the presence of transient in-plane lattice distortions for depositions above 600 °C.