Pulsed-laser time-of-flight atom-probe field ion microscope

Abstract

A linear-type pulsed-laser time-of-flight atom probe has been developed. With a flight path length of ∼200 and ∼425 cm, the mass resolution is comparable to the energy focused time-of-flight atom probe of much more elaborate mechanical and electrical design. The isotopes of Mo, Xe, and W are completely separated to the roots of the mass lines. We also discuss how the mass resolution of the pulsed-laser atom probe can be further improved and where this instrument will be useful.