Publication | Closed Access
Use of surface plasma waves for determination of the thickness and optical constants of thin metallic films
201
Citations
6
References
1981
Year
Optical MaterialsEngineeringSurface PlasmaPlasma ProcessingSurface Plasma WavesOptical PropertiesThin Film ProcessingMaterials ScienceElectrical EngineeringMetal FilmPhysicsThickness DElectrical InsulationElectrical PropertyThin Metallic FilmsSurface CharacterizationSurface AnalysisSurface ScienceApplied PhysicsThin FilmsOptical Constants
The surface plasma wave technique for determining the dielectric constant ∊(ω) and the thickness d of a metal film without a preset expression for ∊(ω) is discussed. Two sets of solutions can be derived at a given frequency. By comparing d determined at another frequency, the correct ∊(ω) and d solution can be determined.
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