Preparation and Properties of Lead Zirconate-Titanate Thin Films

Abstract

Lead zirconate-titanate (PZT, PbZr x Ti 1- x O 3 , x =0.2-0.9) films with submicron thickness (600-900 nm) were prepared using an rf -magnetron sputtering technique. The crystal structure and the orientation of the films were studied as a function of the substrate temperature. The relationships between electric properties and the film compositions were elucidated. The films of x =0.90 exhibit a large remanent polarization of 46 µC/cm 2 and small coercive force of 28 kV/cm. In addition, no fatigue after >10 11 cycles under an accelerated bipolar stressing was observed.