Near-Field Scanning Optical Microscopy (NSOM)

Eric Betzig, M. Isaacson, H. Barshatzky, A. Lewis, Kuan-Ting Lin

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1988 · 25 citations · 0 references

Concepts

Abstract

Superresolution optical images have been generated with near-field scanning optical microscopy (NSOM). The underlying concept is presented and several modes of operation are discussed. A resolution based on edge sharpness of 70 nm or better has been demonstrated with two different instruments. Images have been obtained which characterize the resolution as a function of two critical parameters: the aperture size and the aperture-sample separation. The near-field images also illustrate novel features resulting from several forms of contrast. Finally, the potential of NSOM is compared with conventional lens-based forms of microscopy as well as with more recent scanned tip methods.