A spiral scanning probe system for micro-aspheric surface profile measurement

Self-Calibration: Reversal, Redundancy, Error Separation, and ‘Absolute Testing’

C. J. Evans, R.J. Hocken, William T. Estler · CIRP Annals · 1996 · 392 citations

Reliability, Sensor Calibration, Error Separation +11

Development of Ultrasonic Vibration Assisted Polishing Machine for Micro Aspheric Die and Mold

Hirofumi Suzuki, Taro Moriwaki, Tadashi Okino et al. · CIRP Annals · 2006 · 114 citations

Materials Science, Engineering, Power Ultrasound +8

Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine

Wei Gao, Jun Aoki, Bing Ju et al. · Precision Engineering · 2007 · 82 citations

Diamond-like Carbon, Engineering, Microscopy +13

Nanometer-Level Comparison of Three Spindle Error Motion Separation Techniques

Eric Marsh, Jeremiah A. Couey, R. Ryan Vallance · Journal of Manufacturing Science and Engineering · 2005 · 72 citations

Engineering, Microscopy, Measurement +22

Ultrahigh accuracy 3-D profilometer

Keiichi Yoshizumi, T. Murao, Jiro Masui et al. · Applied Optics · 1987 · 40 citations