Evaluation of (Pb, La)(Zr, Ti)O₃ (PLZT) Capacitors of Different Film Thicknesses with Pt/SrRuO₃ Top Electrodes

Abstract

(Pb, La)(Zr, Ti)O 3 [PLZT] films with thicknesses of 150, 225 and 300 nm were prepared by chemical solution deposition (CSD) on Pt/IrO 2 coated SiO 2 /Si wafers. Top electrodes of Pt/SRO were sputter deposited and annealed at 600°C to form a capacitor. All three PLZT films were highly (111) oriented and showed high switchable polarization of >40 µC·cm -2 at 200 kV·cm -1 . A coercive field of 40 kV·cm -1 was observed for all three films regardless of thickness. Little fatigue degradation was observed up to 10 10 cycles. These results indicate that it is possible to combine both oxide and metallic contacts in a high endurance ferroelectric capacitor for low voltage applications.