Publication | Closed Access
Metalorganic chemical vapor deposition of Cu films from bis(t-butyl-3-oxo-butanoato)copper(II): thermodynamic investigation and experimental verification
16
Citations
8
References
2002
Year
Materials ScienceCu FilmsCopper Oxide MaterialsExperimental VerificationThermodynamic InvestigationEngineeringCorrosionSurface ScienceChemistryChemical DepositionElemental MetalChemical Vapor DepositionThin Film Processing
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