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Amorphous and microcrystalline silicon solar cells prepared at high deposition rates using RF (13.56MHz) plasma excitation frequencies

Materials ScienceHigh Deposition RatesElectrical EngineeringEngineeringApplied PhysicsPlasma Excitation FrequenciesAmorphous SolidSilicon On InsulatorSolar CellsPlasma ProcessingPhotovoltaicsMicroelectronics