Systematic comparison of metal contacts on CVD graphene

Abstract

An experimental study was conducted for forming high quality ohmic contacts to graphene. Metal contacts of platinum/gold (Pt/Au), nickel/gold (Ni/Au), palladium (Pd), Ni, and Au to monolayer chemical vapor deposited graphene were studied. The experimental data reveal that pure Au and Ni/Au provide highly reproducible low resistance ohmic contacts. The results presented in this work indicate potential contact metals suitable for high frequency electronic devices.