Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms - Concepedia

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Design and characterization of a 3D MEMS VOA driven by hybrid electromagnetic and electrothermal actuation mechanisms

18

Citations

47

References

2012

Year

Kah How Koh, You Qian, Chengkuo Lee

Journal of Micromechanics and Microengineering

Abstract

10.1088/0960-1317/22/10/105031

References

	Year	Citations

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