Concepedia

Publication | Closed Access

Formation of titanium silicides by high dose ion implantation

DOI

12

Citations

7

References

1987

Year

V.P. Salvi, Subhaga Vidwans, Abbas A. Rangwala, B. M. Arora, Kuldeep, A. Jain
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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