Publication | Closed Access
RF plasma investigations for plasma-assisted MBE growth of (Ga,In)(As,N) materials
44
Citations
18
References
2002
Year
Materials EngineeringMaterials ScienceRf Plasma InvestigationsEngineeringPhysicsApplied PhysicsMolecular Beam EpitaxyNonthermal PlasmaPlasma ApplicationPlasma Processing
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