Microelectronic Engineering · 2006 · 23 citations · 3 references
EngineeringElectrical EngineeringMaterials EngineeringFinite Element AnalysisFinite Element MethodsMicroelectronicsDevice ModelingFinite Element FormulationIntegrated Circuit DesignMems ModelingStructural Finite Element AnalysisComputational HomogenizationNumerical HomogenizationSubstrate EngineeringWarpage Prediction
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