Sol-gel and mod processing of layered perocskite films

Abstract

Abstract Sol-gel and MOD processes have been used to deposit layered perovskite films such as Bi4Ti3O12, SrBi2Ta2O9 and SrBi2NbTaO9 films on top of Si(100) substrates with Ti/Pt electrodes. Their structural and electrical properties have been studied as a function of processing. Additionally sol-gel and MOD processes have been applied for SrTiO3 films. The morphology of the layers has been characterised and compared with the morphology of layered perovskite films.