Publication | Closed Access
Hidden Electrochemistry in the Thermal Grafting of Silicon Surfaces from Grignard Reagents
42
Citations
29
References
2004
Year
Materials ScienceChemical EngineeringHidden ElectrochemistryElectronic MaterialsEngineeringSurface ScienceSilicon SurfaceSemiconductor Device FabricationChemistryThermal GraftingSilicon SurfacesAlkyl Halide ReductionCovalent GraftingSurface ProcessingSilicon On InsulatorElectrochemistryElectrochemical Surface Science
Covalent grafting of alkyl chains on silicon can be obtained by thermal treatment in Grignard reagents. Alkyl halide present in the Grignard solution as an impurity appears to play a key role in the grafting process. Grafting efficiency is improved when the alkyl halide concentration is increased. It is also enhanced on n-type substrates as compared to p-type substrates and when alkyl bromides are present in solution rather than alkyl chlorides. The grafting reaction involves a zero-current electrochemical step. A reaction model in which simultaneous Grignard oxidation and alkyl halide reduction take place at the silicon surface accounts for all these observations. Alkyl halide reduction is the rate-determining step. Negative charging of the silicon surface lowers the energetic barrier for this reaction, allowing for efficient grafting on n-Si.
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