Comparative study of annealing and oxidation effects in a-SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering - Concepedia

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Comparative study of annealing and oxidation effects in a-SiC:H and a-SiC thin films deposited by radio-frequency magnetron sputtering

31

Citations

32

References

2010

Year

A. V. Vasin, S Muto, Yu Ishikawa, A.V. Rusavsky, A. N. Nazarov

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringNanoelectronicsApplied PhysicsA-sic Thin FilmsRadio-frequency Magnetron SputteringMicroelectronicsComparative StudyThin Film ProcessingCarbide

References

	Year	Citations

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