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Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

Materials EngineeringMaterials ScienceZirconium-doped ZincOptical MaterialsEngineeringIi-vi SemiconductorOptical PropertiesOxide ElectronicsApplied PhysicsRadio Frequency MagnetronOptical CeramicThin Film Processing