Rhodium and Rhodium Oxide Thin Films Characterized by XPS

Abstract

RhO2 belongs to the family of conducting platinum group metal oxides, which have attracted attention as new capacitor electrode materials for dynamic random access memories (DRAMs) and nonvolatile ferroelectric random access memories (FeRAMs). Rh, Rh2O3, and RhO2 thin films were prepared by sputtering and their XPS spectra were collected with a monochromatic Al Kα x-ray source. This report includes XPS spectra of Rh 3d and O 1s core regions for these films.