Journal of Applied Physics · 1977 · 334 citations · 10 references
EngineeringMaterials ScienceHeat TransferSemiconductor DevicesThermal AnalysisDevice CharacterizationHeat Capacity MeasurementTemperature MeasurementThermal Expansion AnalysisThermal Properties Of MaterialsThermal Properties Of SemiconductorsAccuracyExpansion MeasurementsHeat CapacityLaser InterferometryLinear Thermal ExpansionThermal ExpansionThermal Expansion CoefficientThermal Expansion Measurement
Linear thermal expansion measurements have been carried out from 6 to 340 K on a high-purity silicon sample using a linear absolute capacitance dilatometer. The accuracy of the measurements varies from ±0.01×10−8 K−1 at the lowest temperatures to ±0.1×10−8 K−1 or 0.1%, whichever is greater, near room temperature, and is sufficient to establish silicon as a thermal expansion standard for these temperatures. The agreement with previous data is satisfactory at low temperatures and excellent above room temperature where laser-interferometry data of comparable accuracy exist. Thermal expansions calculated from ultrasonic and heat-capacity data are preferred below 13 K where experimental problems occurred.
10
Thermal Expansion of Silicon and Zinc Oxide (I)
H. Ibach · physica status solidi (b) · 1969 · 191 citations