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Linear thermal expansion measurements on silicon from 6 to 340 K
328
Citations
10
References
1977
Year
EngineeringIntegrated CircuitsSilicon On InsulatorThermal AnalysisThermodynamicsInstrumentationPhysicsThermal PhysicsSemiconductor Device FabricationHeat TransferSilicon DebuggingRoom TemperatureApplied PhysicsTemperature MeasurementThermal ExpansionsThermal Expansion StandardThermal SensorThermal EngineeringThermal Property
Linear thermal expansion measurements have been carried out from 6 to 340 K on a high-purity silicon sample using a linear absolute capacitance dilatometer. The accuracy of the measurements varies from ±0.01×10−8 K−1 at the lowest temperatures to ±0.1×10−8 K−1 or 0.1%, whichever is greater, near room temperature, and is sufficient to establish silicon as a thermal expansion standard for these temperatures. The agreement with previous data is satisfactory at low temperatures and excellent above room temperature where laser-interferometry data of comparable accuracy exist. Thermal expansions calculated from ultrasonic and heat-capacity data are preferred below 13 K where experimental problems occurred.
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