Electronics Letters · 1971 · 26 citations · 5 references
Natural SciencesMaterials EngineeringMaterials ScienceAcousticsSurface ScienceThin FilmsOxide SemiconductorsSurface PhysicsSurface Wave MethodsThin-film DepositionTransducer TechnologyUltrasonicsSemiconductor Oxide Thin FilmsSurface Acoustic Wave TransductionSurface Acoustic WavesTransducer FabricationZinc Oxide NanostructuresZinc Oxides
Surface waves have been excited efficiently on fused silica using sputtered ZnO films in conjunction with various transducer arrangements. The results are very promising and have yielded values of K2 up to 0.76%.
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