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Crystalline Orientation Control for Bi-Sr-Ca-Cu-O Thin Films Prepared on (110)SrTiO<sub>3</sub> by Coevaporation
16
Citations
8
References
1991
Year
Superconducting MaterialEngineeringBi-sr-ca-cu-o Thin FilmsSolid-state ChemistryThin Film Process TechnologyRf Oxygen PlasmaCrystalline Orientation ControlSuperconductivityHigh Tc SuperconductorsEpitaxial GrowthThin Film ProcessingMaterials ScienceHigh-tc SuperconductivityOxide ElectronicsMaterial AnalysisSurface ScienceCondensed Matter PhysicsApplied PhysicsThin FilmsRf Power
Superconducting Bi-Sr-Ca-Cu-O thin films were prepared on (110)SrTiO 3 substrates by coevaporation with an rf oxygen plasma. Four orientation categories were observed, the 2223-phase (119) orientation, the 2212-phase (119) orientation, the 2212-phase (117) orientation, and the 2212-phase (00 n ) orientation. It has been confirmed that these orientations can be controlled by changing the rf oxygen plasma conditions. The (00 n ) orientation grew as the oxygen flow rate increased or as the rf power increased.
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