Publication | Closed Access
Ripple Wave Vector Rotation in Anisotropic Crystal Sputtering
182
Citations
23
References
1998
Year
EngineeringAnisotropic CrystalAcoustic MetamaterialThin Film Process TechnologyOptical PropertiesSurface MorphologyThin Film ProcessingAnisotropic MaterialMaterials SciencePhysicsCrystalline DefectsCrystallographyMicrostructureSurface CharacterizationSurface AnalysisSurface ScienceApplied PhysicsIon SputteringThin FilmsContinuum Equation
Surface morphology of a Cu(110) crystal, generated by ion sputtering, has been investigated by scanning tunneling microscopy. Different from recent theoretical predictions and experimental results, normal sputtering produces a well defined ripple structure whose wave vector rotates from $〈001〉$ to $〈1\overline{1}0〉$ by increasing the substrate temperature. Off-normal sputtering at low temperature (180 K) generates ripples whose orientation depends on both ion direction and surface azimuthal orientation. These results are described by a continuum equation which includes both surface curvature dependent erosion terms and diffusion terms accounting for surface anisotropy and Ehrlich-Schwoebel barriers.
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