Self-organization of semiconductor nanocrystals by selective surface faceting

Abstract

The formation and ordering of Si nanocrystals in dewetting and agglomeration of the thin single crystalline Si layer in silicon-on-insulator has been investigated using low-energy electron microscopy. The evolution of the Si dewetting and agglomeration is captured in real time, revealing the detailed process for the formation and ordering of the nanocrystals. A surface faceting mechanism governing this self-organized process is proposed and supported with first-principles calculations.