Surface roughness reducing effect of iodine sources (CH3I, C2H5I) on Ru and RuO2 composite films grown by MOCVD - Concepedia

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Surface roughness reducing effect of iodine sources (CH3I, C2H5I) on Ru and RuO2 composite films grown by MOCVD

26

Citations

25

References

2002

Year

Jae Jeong Kim, Doo Hwan Jung, Moon Soo Kim, Sang Hyun Kim, Do Young Yoon

Thin Solid Films

Materials ScienceSurface CharacterizationRuo2 Composite FilmsEngineeringSurface RoughnessSurface ScienceApplied PhysicsIodine SourcesSurface EngineeringSurface ProcessingThin Film Processing

References

	Year	Citations

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