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Structural and electrical properties of Ta–Al thin films by magnetron sputtering
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1999
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Materials ScienceMaterials EngineeringThin Film PhysicsMaterial AnalysisEngineeringApplied PhysicsMagnetron SputteringThin Film DevicesMagnetic Thin FilmsThin FilmsThin Film Process TechnologyElectrical PropertiesTa–al Thin FilmsThin Film Processing
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