Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications - Concepedia

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Publication | Open Access

Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

DOI Full Paper Access

63

Citations

43

References

2014

Year

Federico Dalcanale, Jonas Grossenbacher, Gurdial Blugan, Maurizio R. Gullo, A. Lauria, Juergen Brügger, Hendrik T. Tevaearai, Thomas Graule, Markus Niederberger, Jakob Kuebler

Journal of the European Ceramic Society

Materials ScienceElectrical EngineeringEngineeringCeramic MaterialMems ApplicationsElectrical ConductivityCarbon EnrichmentCeramic TechnologyElectrical PropertiesElectrical InsulationMixed Conductors

References

	Year	Citations

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