Structural and mechanical properties of ZrN films prepared by ion beam sputtering with varying N2/Ar ratio and substrate temperature - Concepedia

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Structural and mechanical properties of ZrN films prepared by ion beam sputtering with varying N2/Ar ratio and substrate temperature

43

Citations

14

References

2006

Year

M. M. Larijani, Nooshin Salman Tabrizi, Sh. Norouzian, A.H. Jafari, S. Lahouti, Hashem Hosseini, N. Afshari

Materials ScienceMaterials EngineeringZrn FilmsEngineeringMechanical PropertiesApplied PhysicsIon BeamVacuum DeviceMicroelectronicsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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